SURF-CAL Particle Deposition Standards provide a cost effective and reliable method for preparing calibration wafers for calibration and maintenance of Surface Scanning Inspection systems (SSIS). The size range of 0.047 to 3.0 µm was established together with the semiconductor industry and SEMI and is considered the critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS). The product is a suspension of NIST traceable polystyrene microspheres whose concentration has been optimized for deposition on wafers by nebulization.
When used with conventional particle deposition systems, the 3 x 108 particles per mL suspension will deposit between 6 and 10 particles per square centimeter on a 200 mm wafer in 30-60 seconds.
Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques. The cleanliness of the suspension minimizes residue on the particle and the surface of the wafer, allowing easy calibration of scanners over their entire range of operation. With low non-volatile solids content, SURF-CAL is useful for other aerosol particle measurement applications.
Product specifications:
Monosized Polymer Microspheres, available sizes nominal diameter: 0.047 – 3.04 µm
Polystyrene
3x10E8 #/mL
NIST traceable
Color: White or Colorless
Application: SSIS Calibration and Maintenance
Particle Density: 1.05g/cm³
Refractive Index: 1.59 at 589nm (25°C)
Shelf Life: Minimum of 12 months
Unit: 50 mL
| Product Code | Product | Unit | Quotation |
|---|---|---|---|
| PD-047 | Monosized Polymer Microspheres,0.047 µm | 50 mL | |
| PD-047B | Monosized Polymer Microspheres, 0.047 µm | 50 mL | |
| PD-064 | Monosized Polymer Microspheres, 0.064 µm | 50 mL | |
| PD-083 | Monosized Polymer Microspheres, 0.084 µm | 50 mL | |
| PD-083B | Monosized Polymer Microspheres, | 50 mL | |
| PD-092 | Monosized Polymer Microspheres, 0.092 µm | 50 mL | |
| PD-100 | Monosized Polymer Microspheres, 0.100 µm | 50 mL | |
| PD-100B | Monosized Polymer Microspheres, 0.100 µm | 50 mL | |
| PD-125 | Monosized Polymer Microspheres, 0.126 µm | 50 mL | |
| PD-155 | Monosized Polymer Microspheres, 0.155 µm | 50 mL | |
| PD-155B | Monosized Polymer Microspheres, 0.155 µm | 50 mL | |
| PD-200 | Monosized Polymer Microspheres, 0.202 µm | 50 mL | |
| PD-200B | Monosized Polymer Microspheres, 0.2027µm | 50 mL | |
| PD-204 | Monosized Polymer Microspheres, 0.204 µm | 50 mL | |
| PD-204B | Monosized Polymer Microspheres, 0.204 µm | 50 mL | |
| PD-215 | Monosized Polymer Microspheres, 0.220 µm | 50 mL | |
| PD-215B | Monosized Polymer Microspheres, 0.220 µm | 50 mL | |
| PD-305 | Monosized Polymer Microspheres, 0.304 µm | 50 mL | |
| PD-305B | Monosized Polymer Microspheres, 0.304 µm | 50 mL | |
| PD-365 | Monosized Polymer Microspheres, 0.360 µm | 50 mL | |
| PD-365B | Monosized Polymer Microspheres, 0.360 µm | 50 mL | |
| PD-500 | Monosized Polymer Microspheres, 0.494 µm | 50 mL | |
| PD-500B | Monosized Polymer Microspheres, 0.494 µm | 50 mL | |
| PD-800 | Monosized Polymer Microspheres, 0.809 µm | 50 mL | |
| PD-802 | Monosized Polymer Microspheres, | 50 mL | |
| PD-802B | Monosized Polymer Microspheres, | 50 mL | |
| PD1100 | Monosized Polymer Microspheres, 1.112 µm | 50 mL | |
| PD1100B | Monosized Polymer Microspheres, 1.112 µm | 50 mL | |
| PD2000 | Monosized Polymer Microspheres, 2.01 µm | 50 mL | |
| PD3000 | Monosized Polymer Microspheres, 3.04 µm | 50 mL |