Surf-Cal™ Particle Size Standards

Surf-Cal simplifies the job of preparing calibration wafers in your facility.

Surf-Cal size standards meet SEMI* standard guideline M52, and feature certified diameters that have been calibrated by TEM or optical microscopy, and are traceable to the Standard Meter of the National Institute of Standards and Technology (NIST).

*Semiconductor Equipment and Materials Inspection organization

SURF-CAL™ Particle Deposition Standards provide a cost effective and reliable method for preparing calibration wafers for calibration and maintenance of Surface Scanning Inspection systems (SSIS). The size range of 0.047 to 3.0 µm was established together with the semiconductor industry and SEMI and is considered the critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).

The product is a suspension of NIST traceable polystyrene microspheres whose concentration has been optimized for deposition on wafers by nebulization. When used with conventional particle deposition systems, the 3 x 10⁸ particles per mL suspension will deposit between 6 and 10 particles per square centimeter on a 200 mm wafer in 30-60 seconds. Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques

The cleanliness of the suspension minimizes residue on the particle and the surface of the wafer, allowing easy calibration of scanners over their entire range of operation. With low non-volatile solids content, SURF-CAL is useful for other aerosol particle measurement applications.